KLA Spare Parts Shop | PSL Metrology Singapore - Page 9

Archer 10 | XT, Archer AIM+ | XT+, Flotation Active Isolation

716-480011-000 - CTC_Flotation_Table

Archer 10 | XT, HLS (Halogen Light Source)

720-480018-000 - 5300 HALOGEN LIGHT SOURCE (HLS) ASSY

AMS (12K & 750K) Camera, Archer 10 | XT, Archer AIM+ | XT+, Optics / FRM / Linnik

720-480036-001 - AMS Camera Assembly

AMS (12K & 750K) Camera, Archer 10 | XT, Archer AIM+ | XT+

720-482040-000 - AMS LAMP 750 (840U)

735-480007-000 / 564-480374-000 - Pneumatic Panel

Archer 100 | 200, Archer AIM+ | XT+

750-452043 - 000 - Z-Stage Assy

Archer 10 | XT, Archer AIM+ | XT+, Flotation Active Isolation

750-480037-000 - IDE_CONTROLLER_FOR_CTC-1

Archer 10 | XT, X|Y|T Stage & Drivers

750-482414-000 - X/Y MOTOR DRIVER WITH A/O BOARD ASSY SHNEEBERGER;5 (DSB2P101-121E-010H)

Archer 10 | XT, X|Y|T Stage & Drivers

750-482414-001 - ETEL DSB2 NANOMETER XY (DSB2P101-121E-010H)

Archer 10 | XT, X|Y|T Stage & Drivers

750-482417-000 - T/Z/L CONTROLLERS BOARD-STANDARD DSB2 SCHNEEBERGER (DSB2P101-121E-009H)

Archer 10 | XT, X|Y|T Stage & Drivers

750-482418-000 - CONTROLLER POWER SUPPLY DSB (ZICON ZE200-539)

Archer 10 | XT, Archer AIM+ | XT+

750-482420-000 T- MOTOR STAGE

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