KLA Spare Parts Shop | PSL Metrology Singapore - Page 2

Archer 10 | XT, Archer AIM+ | XT+, Overlay 5300 | Archer 5

0042892-000 - Open Handler AC & Interlock Box

Archer 10 | XT, Overlay System Computers

0047044-000 - KONTRON ICS-ADVENT Computer

Archer 10 | XT, Archer AIM+ | XT+

0050576-000 - Z-Motor & Encoder Replacement, HLS (Halogen Light Source)

0051644-000 - Interface Board (A10 & XT & Early AIM)

A300, Archer 10 | XT, Archer 100 | 200, Archer 300+ | Archer 500, Archer AIM+ | XT+, Overlay 5300 | Archer 5

0056897-000 - Vacuum Filter

Archer 10 | XT, X|Y|T Stage & Drivers

0058784-000 - ETEL DSB2 NANOMETER XY (DSB2P101-121E-010H)

Archer 10 | XT, PCB’s & Power Supplies

0059518-000 - PZT Driver Board

Robot Handlers – Brooks

0080995-000 - ESC Controller V5.04IAPS

0083821-000 Line Conditioner

0084664-000 - Interface Board AIM Only

Phoenix Handler

0085048-003 Asyst Advantag

2367 Parts, PARTS, PUMA 91XX

0086079-000 - IDA Board (2367 & PUMA Node internal PCB)

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