PARTS - PSL Metrology Pte Ltd - Page 8

5300 VME RACK

Archer 10 | XT, Archer AIM+ | XT+

565 091 086-000 KLA 5300 XYT ASSY

Archer 10 | XT, Archer AIM+ | XT+

565-090513-000 KLA 5300 XYT ASSY

Archer 10 | XT, Archer AIM+ | XT+

573 010 410-000 KLA 5300 XYT ASSY

Robot Handlers – Brooks

6-0002-0420-SP_PRI Brooks 200MM PREALIGNER

710-480101-000 Interface Board 5300

Archer 10 | XT, Optics / FRM / Linnik, PARTS

710-482350-000 - PDA Box used on Archer 10 & XT Tools

712-480100-000 5300 AC COMPARTMENT

Archer 10 | XT, Archer AIM+ | XT+, Flotation Active Isolation

716-480011-000 - CTC_Flotation_Table

Archer 10 | XT, HLS (Halogen Light Source)

720-480018-000 - 5300 HALOGEN LIGHT SOURCE (HLS) ASSY

AMS (12K & 750K) Camera, Archer 10 | XT, Archer AIM+ | XT+, Optics / FRM / Linnik

720-480036-001 - AMS Camera Assembly

AMS (12K & 750K) Camera, Archer 10 | XT, Archer AIM+ | XT+

720-482040-000 - AMS LAMP 750 (840U)

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