PARTS - PSL Metrology Pte Ltd - Page 7

Archer 10 | XT, Optics / FRM / Linnik

0391620-000 - FRU KIT,SHUTTER SUBASSY,PERIODIC (5300, A10 & XT)

Archer AIM+ | XT+, Optics / FRM / Linnik

0391622-000 - SHUTTER ASSEMBLY (XT+ & AIM+)

Archer 100 | 200, Archer AIM+ | XT+, HLS (Halogen Light Source)

0560669-000 - PKG,FRU,HLS100 LAMP MODULE

Phoenix Handler-FEC

0581064-001 AA FEC PHOENIX HANDLER

Archer 10 | XT, Archer 100 | 200, Archer AIM+ | XT+

070-480031-00 - Power Supply VICOR FLATPAC Model VI-RU013-EYXV

Archer 100 | 200

070-480158-000 - HALOGEN POWER SUPPLY (HLS) 12V/75W VICOR

Archer 10 | XT, Optics / FRM / Linnik, PARTS

073-450817-000 PAD Assy 5300

Archer 10 | XT, PCB’s & Power Supplies

073-480099-000 - PZT Driver Board 5300

Phoenix Handler, Robot Handlers – Brooks, SP1 Parts

12000-032 - KLA SP1 ASYST 21 Robot - V1.1B

Archer 10 | XT, HLS (Halogen Light Source)

127-483105-000 - HLS LAMP (BURN-IN) 50W12V;OSRAM

PARTS, SMIF & 300mm Loadports

3200-1065-04 ASYST Indexer Controller.

Archer 100 | 200

450-482762-000 - PZT-Z DRIVE UNIT PI_P-953.21

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